中文簡介

半導體加工中的材料科學為討論光電子、傳感器、探測器、生物技術和綠色能源的功能材料和器件的新加工、應用和理論研究提供了一個獨特的論壇。每一期將致力于提供當前的快照的見解、新成果,突破和未來趨勢等不同領域的微電子、能源轉換和存儲、通信、生物技術(圖)催化、納米薄膜技術,混合和復合材料、化學處理、氣相沉積、設備制造、和造型的支柱先進半導體加工和應用。覆蓋范圍將包括:用于亞微米設備的先進光刻技術;蝕刻及相關課題;離子注入;損害演化及其相關問題;等離子體和熱CVD;快速熱處理;先進的金屬化和互連方案;介質層薄，氧化;溶膠-凝膠法加工;化學浴和(電)化學沉積;化合物半導體加工;新型非氧化物材料及其應用(宏觀)分子和雜化材料;分子動力學、從頭算方法、蒙特卡羅方法等;分立電路和集成電路的新材料和新工藝;磁性材料和自旋電子學;異質結構和量子器件;半導體光電特性工程;晶體生長機制;可靠性，缺陷密度，固有雜質和缺陷。

　　英文簡介

Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.

　　近年期刊自引率趨勢圖

　　JCR分區

JCR分區等級	JCR所屬學科	分區	影響因子
Q2	MATERIALS SCIENCE, MULTIDISCIPLINARY	Q2	4.644
	PHYSICS, APPLIED	Q2
	PHYSICS, CONDENSED MATTER	Q2
	ENGINEERING, ELECTRICAL & ELECTRONIC	Q2

　　近年期刊影響因子趨勢圖

　　CiteScore數值

CiteScore	SJR	SNIP	學科類別	分區	排名	百分位
6.70	0.687	1.062	大類：Engineering 小類：Mechanical Engineering	Q1	84 / 601	86%
			大類：Engineering 小類：Mechanics of Materials	Q1	57 / 384	85%
			大類：Engineering 小類：Condensed Matter Physics	Q1	68 / 415	83%
			大類：Engineering 小類：General Materials Science	Q1	100 / 455	78%

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